Pressure-thermometer in same time

ABSTRACT

The present invention relates to a pressure-thermometer in same time (thermometer combined with manometer) capable of achieving one combined meter in which a Bourdon tube manometer and a bimetal type thermometer are combined. A pressure scale and a temperature scale are separately formed on a character plate in a rectangular or circular casing. There is provided a separation type manometer-combined thermometer in which the centers of a pressure indication hand and a temperature indication hand are separated. There is provided an integration type manometer combined thermometer in which a pressure indication hand and a temperature indication hand are utilized together based on the same center. The above two constructions are achieved based on a dual shank and a dual movement.

TECHNICAL FIELD

The present invention relates to a pressure-thermometer in same time(thermometer combined with manometer) capable of achieving one combinedmeter in which a Bourdon tube manometer and a bimetal type thermometerare combined. A pressure scale and a temperature scale are separatelyformed on a character plate in a rectangular or circular casing. Thereis provided a separation type manometer-combined thermometer in whichthe centers of a pressure indication hand and a temperature indicationhand are separated. There is provided an integration type manometercombined thermometer in which a pressure indication hand and atemperature indication hand are utilized together based on the samecenter. The above two constructions are achieved based on a dual shankand a dual movement.

BACKGROUND ART

Generally, the sizes of a capacity, speed, vibration, temperature,pressure, calorie and length or a physical state are detected based on acertain data (value) and are recorded and displayed using a certainmeasuring meter.

As a measuring meter capable of measuring a pressure of a fluid or gasor gravity, there are a mercury manometer having a certain weight andbalance, a Bourdon tube manometer having an elastic force of an elasticmember and a balance with respect to a dead weight manometer, and anelectricity resistance manometer implemented using a physical phenomenonvarying based on a diaphragm and a pressure.

Among the above manometers, the Bourdon tube manometer has been mostwidely used because it is possible to directly read the scalescorresponding pressures, and it is easy to use the same.

In addition, as a thermometer generally used for an oxidation andspreading facility of a semiconductor fabrication process together withthe above manometer, there are a thermal vibration thermometer capableof measuring temperature using an electromotive force generated byforming a closed circuit by connecting two kinds of metallic ends andchanging the temperatures of both connection points, a mercurythermometer using a thermal expansion of mercury, and a temperaturesensor implemented using thermoelectric couple widely used for thepurpose of industry capable of measuring a temperature ranging from 400°C. to 1400° C.

However, in the above described thermometer and manometer, thethermometer and the manometer are separately installed. Therefore, anadditional installation space is needed for both the thermometer andmanometer. In addition, it is impossible to concurrently check thethermometer and the manometer because they are separately installed. Thepressure and temperature of a fluid in a pipe should be concurrentlymeasured. However, the pressure and temperature of the same areseparately measured, so that an s error range is increased. There aremany problems when maintaining the measuring units for thereby causinginconvenience during a measuring operation. There is a safety problem,so that workability is decreased.

DISCLOSURE OF INVENTION

Accordingly, it is an object of the present invention to overcome theabove conventional problems.

It is another object of the present invention to provide a combinedmeasuring unit capable of concurrently measuring pressure andtemperature wherein the temperature and pressure are concurrentlymeasured at one point using one measuring unit. There is provided a dualshank connecting to different ways so that there is not any interferencebetween pressure and temperature. Pressure and temperature indicationhands are shared. A dual movement capable of precisely indicating valuesis used for thereby implementing a desired object of the presentinvention.

To achieve the above objects, there is provided a combined measuringunit capable of concurrently measuring pressure and temperature in whichthe pressure and temperature indication hands are implemented based on aseparation type and an integration type because there is a difference inthe inner structure and parts based on a method for indicating apressure value and a temperature value.

To achieve the above objects, there is provided a separation type of amanometer combined thermometer comprising one casing in which pressureand temperature are measured. The thermometer includes a bimetalconnected with a temperature indication hand 11, and a dual shankengaged to an upper outer side of a detection rod and capable of fixinga process chamber. The manometer includes a socket passing through alower side of the dual shank of the thermometer and detecting a pressureof fluid and transferring a fluid pressure, a Bourdon tube attached tothe socket and moved based on pressure, a dual movement capable oflargely amplifying a small movement of the Bourdon in cooperation withthe Bourdon tube, and a pressure indication hand indicating a pressurevalue on the indication plate in cooperation with the shaft of the dualmovement.

The dual shank is a path capable of transferring a pressure andtemperature of fluid to the measuring unit and is implemented based on amethod that a hole is formed at the center of the dual shank, and a holeis formed in a thickness portion between the center hole and an outerscrew for thereby implementing a compatibility operation using two holesfor the pressure and temperature. There is another method that atemperature detection rod is, inserted into the center of the dualshank, and a hole is formed in a surrounding portion of the detectionrod with a size of 1 mm between the outer portion of the detection rodand the inner wall of the dual shank, so that the circular holesurrounding the detection rod is used as a path of pressure fluid.

Therefore, in the separate type of the manometer combined thermometeraccording to the present invention, only the dual shank is used. Thedual movement is not adapted. Namely, a common dual movement is adapted.

In the integration type of the manometer combined thermometer accordingto the present invention, the pressure and temperature values areimplemented in one casing. In the thermometer, the detection rod havinga bimetal passes through the center of the dual shank and contacts withfluid outside the dual shank.

At this time, the bimetal detects fluid temperature and is contractedand expanded. The above change is transferred to the shaft. The shaftpasses through the inner diameter portion of the center gear shaft ofthe dual movement for thereby moving an indication hand connected to theend of the shaft, so that the temperature is indicated. The dual shankhas a diameter larger than 1 mm as compared to the diameter of thetemperature detection rod installed in the center portion, so that thegap of 1 mm between the detection rod and the wall of the dual shank isused as a path of the pressure fluid (type 1). A hole is formed in thecenter of the dual shank. A hole is formed between the center and theouter screw portion. Namely, two holes are totally formed. One hole isformed for the temperature detection rod, and the other hole is formedfor the path of the pressure rod for thereby implementing compatibility.

The fluid passing in the above manner moves the pressure indication handconnected to an outer portion of the center gear of the dual movementfor thereby indicating pressure.

Therefore, in the integration type of the manometer combined thermometeraccording present invention, the dual shank and the dual movement areadapted for thereby achieving a desired function.

BRIEF DESCRIPTION OF DRAWINGS

The present invention will become better understood with reference tothe accompanying drawings which are given only by way of illustrationand thus are not limitative of the present invention, wherein;

FIG. 1 is a plane view illustrating a separation type of a manometercombined thermometer according to the present invention;

FIG. 2 is a plane view illustrating an integration type of a manometercombined thermometer according to the present invention;

FIG. 3 is a lateral view of FIG. 1;

FIG. 4 is a cut-away view of a type 1 of a dual shank;

FIG. 5 is a cut-away view of a type 2 of a dual shank;

FIG. 6 is a plane view of a dual movement;

FIG. 7 is a lateral view of FIG. 6; and

FIG. 8 is a view illustrating an inner structure of a separation type ofa manometer combined thermometer according to the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

The preferred embodiments of the present invention will be describedwith reference to the accompanying drawings.

1. Separation Type of Manometer Combined Thermometer

As shown in FIG. 1, in a circular or rectangular casing, a pressurescale is provided in an upper side of a character plate, and atemperature scale is provided in a lower side. The ranges of thepressure and temperature scales are 180° or 270°.

At this time, the dual shank is shown as an example with a referencenumeral 15 of FIG. 8.

2. Integration Type of Manometer Combined Thermometer

As shown in FIG. 2, the integration type uses a circular casing. Apressure scale is formed on the character plate, and a pressure scale isformed on the outer side of the character plate. The temperature scaleis formed in the inner side. The indication hands of the pressure andtemperature have the same sizes. The temperature scales and thetemperature indication hands have the same colors, and the pressurescales and the pressure indication hands have the same colors, so thatit is possible to easily recognize the pressure and temperature. Inaddition, there is a big brightness difference between the pressure andthe temperature.

INDUSTRIAL APPLICABILITY

The manometer combined thermometer according to the present invention isconstructed in such a manner that the pressure of the fluid is appliedin the dual shank, and at the same time the detection rod of thethermometer detects the surrounding temperature of the dual shank forthereby indicating temperature. The thusly measured pressure andtemperature pass through the dual movement without any interference andobstacle and are transferred to the indication hands, so that pressureand temperature are indicated on the character plate. In the presentinvention, it is possible to easily concurrently measure the temperatureand pressure at the same point with respect to fluid to be measuredusing one measuring unit. In the present invention, it is possible toovercome the problems of a space limit, two times increase ofinstallation cost, an error of the fluid measuring value due to an upperposition of the pressure and temperature measuring points. In addition,it is possible to obtain a driver's safety as compared to themeasurements of the separately installed thermometer and manometer. Itis possible to save work time of workers because the pressure andtemperature are measured at one point, and energy is saved. Thefabrication cost is decreased because the parts such as casing and shankare not needed. A cost required for workers is also decreased.

The present invention is not limited to the above embodiment. As thepresent invention may be embodied in several forms without departingfrom the spirit or essential characteristics thereof, it should also beunderstood that the above-described examples are not limited by any ofthe details of the foregoing description, unless otherwise specified,but rather should be construed broadly within its spirit and scope asdefined in the appended claims, and therefore all changes andmodifications that fall within the meets and bounds of the claims, orequivalences of such meets and bounds are therefore intended to beembraced by the appended claims.

1. A manometer combined thermometer, comprising: a casing in which amanometer and a thermometer are concurrently accommodated, wherein inthe manometer a pressure of a fluid detected by an inlet 26 through adual shank of a measuring unit passes through a Bourdon tube 22, and adual movement 25 is moved in cooperation with a change of a Bourdontube, and the values are indicated by a pressure indication hand 23, andin the thermometer, the temperature of the fluid in the interior of aprocess chamber 13 is indicated by moving a temperature indication hand11 through a shaft 31 based on a change in a bimetal provided in theinterior of the temperature detection rod 14; and wherein in thethermometer, the temperature is detected outside the temperaturedetection rod of the dual shank, and an inlet 26 into which a pressurefluid is flown is formed in the dual shank 15, and two holes forpressure and temperature are formed in the dual shank based on a methodin which the manometer and the thermometer are installed in vertical andhorizontal shapes; and wherein the dual shank is implemented based on amethod (1) in which a hole of a temperature detection rod installed atthe center is formed in the dual shank, and another hole of a pressurefluid is formed in a circle shape in the surrounding portion of thedetection rod with a diameter of 1 mm, and a method (2) in which a holeis formed in the center of the dual shank, and another hole is formedbetween the center and an outer side of the shank, so that both holesare used for an inlet of the pressure fluid and an installation of thetemperature detection rod.
 2. A manometer combined thermometer,comprising: a casing in which a manometer and a thermometer areconcurrently accommodated, wherein in the manometer, a fluid pressurepassing through a dual shank 15 and detected from an inlet 26 andcooperates with a dual movement based on a change of the Bourdon tube,and in the thermometer, a temperature is detected outside thetemperature detection rod of the dual shank, and at the same time, istransferred to a shaft cooperating with the bimetal installed in theinterior of the temperature detection rod, and the shaft passes throughthe dual shank and the hole passing through the interior of the centergear shaft 24 of the dual movement, so that a temperature indicationhand engaged to an end of the same is operated, wherein the dualmovement is capable of amplifying the pressure of the Bourdon tube ofthe manometer, and the outer side of the center gear shaft becomes acenter of the pressure indication hands, and the bimetal shaft passesthrough the interior of the center gear shaft, and the outer side of thecenter shaft becomes a center of the temperature indication hands,wherein the dual movements of the above two functions are called a dualmovement as a major element of the manometer and the thermometer.